Formation of metal oxides by cathodic arc deposition
نویسندگان
چکیده
منابع مشابه
Deposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
متن کاملUltraviolet and visible Raman analysis of thin a-C films grown by filtered cathodic arc deposition
Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been examined by ultraviolet (UV) at 325 nm and visible Raman spectroscopy at 457 nm excitation wavelength. The comprehensive study of behaviour of G, D and T band with sp/sp content has been carried out. The upwards shift of the G peak with sp content was observed for both...
متن کاملBioactivity and cytocompatibility of zirconia (ZrO(2)) films fabricated by cathodic arc deposition.
Zirconium oxide thin films were fabricated on silicon wafers using a filtered cathodic arc system in concert with oxygen plasma. The structure and phase composition of the zirconium oxide thin films were characterized by atomic force microscopy (AFM), X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS), and transmission electron microscopy (TEM). The bioactivity was assessed b...
متن کاملAchieving high mobility ZnO : Al at very high growth rates by dc filtered cathodic arc deposition
Achieving a high growth rate is paramount for making large-area transparent conducting oxide coatings at a low cost. Unfortunately, the quality of thin films grown by most techniques degrades as the growth rate increases. Filtered dc cathodic arc is a lesser known technique which produces a stream of highly ionized plasma, in stark contrast to the neutral atoms produced by standard sputter sour...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 1995
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)02508-1